Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Joseph D. Sweeney, Paul J. Marganski, W. Karl Olander | 2004-10-19 |
| 6740586 | Vapor delivery system for solid precursors and method of using same | Thomas H. Baum, Chongying Xu | 2004-05-25 |
| 6716271 | Apparatus and method for inhibiting decomposition of germane | Jose I. Arno, Edward A. Sturm, James Dietz | 2004-04-06 |