Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Joseph D. Sweeney, Paul J. Marganski, Luping Wang | 2004-10-19 |
| 6770117 | Ion implantation and wet bench systems utilizing exhaust gas recirculation | — | 2004-08-03 |