Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Paul J. Marganski, W. Karl Olander, Luping Wang | 2004-10-19 |
| 6759018 | Method for point-of-use treatment of effluent gas streams | Jose I. Arno, Mark Holst, Sam Yee, Jeff Lorelli, Jason Deseve | 2004-07-06 |