Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794304 | Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene process | Shiqun Gu, Masaichi Eda, Hong Lin, Jim Elmer | 2004-09-21 |
| 6743669 | Method of reducing leakage using Si3N4 or SiON block dielectric films | Hong Lin, Shiqun Gu | 2004-06-01 |
| 6673200 | Method of reducing process plasma damage using optical spectroscopy | Shiqun Gu, Ryan Tadashi Fujimoto | 2004-01-06 |