Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818516 | Selective high k dielectrics removal | Wai Lo, Hong Lin, James R. B. Elmer | 2004-11-16 |
| 6806038 | Plasma passivation | Hong Lin, Ryan Tadashi Fujimoto | 2004-10-19 |
| 6794304 | Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene process | Masaichi Eda, Peter McGrath, Hong Lin, Jim Elmer | 2004-09-21 |
| 6746925 | High-k dielectric bird's beak optimizations using in-situ O2 plasma oxidation | Hong Lin, Wai Lo, Jim Elmer | 2004-06-08 |
| 6743669 | Method of reducing leakage using Si3N4 or SiON block dielectric films | Hong Lin, Peter McGrath | 2004-06-01 |
| 6673200 | Method of reducing process plasma damage using optical spectroscopy | Peter McGrath, Ryan Tadashi Fujimoto | 2004-01-06 |