Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828569 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Willem Van Schaik, Bastiaan Mertens, Norbertus Benedictus Koster | 2004-12-07 |
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more | 2004-08-24 |
| 6750474 | Semiconducting devices and method of making thereof | Rudolf Emmanuel Isidore Schropp | 2004-06-15 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Willem Van Schaik, Antonie Ellert Duisterwinkel, Bastiaan Mertens, Norbertus Benedictus Koster | 2004-04-20 |
| 6686230 | Semiconducting devices and method of making thereof | Rudolf Emmanuel Isidore Schropp | 2004-02-03 |