Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828569 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Willem Van Schaik, Hans Meiling, Norbertus Benedictus Koster | 2004-12-07 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Willem Van Schaik, Antonie Ellert Duisterwinkel, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |