Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828569 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-12-07 |
| 6825914 | System for flushing at least one internal space of an objective | Joachim Schroeder, Gerald Richter, Dieter Schmerek, Uwe Schubert, Maria Johanna Agnes Rubingh +1 more | 2004-11-30 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Antonie Ellert Duisterwinkel, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |