Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Willem Van Schaik, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |