Issued Patents 2003
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, David R. Evans | 2003-12-30 |
| 6664116 | Seed layer processes for MOCVD of ferroelectric thin films on high-k gate oxides | Tingkai Li | 2003-12-16 |
| 6664117 | Method for resistance memory metal oxide thin film deposition | Wei-Wei Zhuang, Jong-Jan Lee | 2003-12-16 |
| 6660628 | Method of MOCVD Ti-based barrier metal thin films with tetrakis (methylethylamino) titanium with octane | Wei Pan, Wei-Wei Zhuang, David R. Evans | 2003-12-09 |
| 6654210 | Solid-state inductor and method for same | Wei Pan, Wei-Wei Zhuang | 2003-11-25 |
| 6649457 | Method for SOI device isolation | — | 2003-11-18 |
| 6649963 | Ferroelectric memory cell for VLSI RAM | Jong-Jan Lee | 2003-11-18 |
| 6649957 | Thin film polycrystalline memory structure | Tingkai Li, Fengyan Zhang, Wei-Wei Zhuang | 2003-11-18 |
| 6642138 | Process of making dual damascene structures using a sacrificial polymer | Wei Pan | 2003-11-04 |
| 6632731 | Structure and method of making a sub-micron MOS transistor | Yanjun Ma, David R. Evans, Yoshi Ono | 2003-10-14 |
| 6630702 | Method of using titanium doped aluminum oxide for passivation of ferroelectric materials and devices including the same | Fengyan Zhang, Hong Ying | 2003-10-07 |
| 6627510 | Method of making self-aligned shallow trench isolation | David R. Evans, Bruce D. Ulrich, Douglas J. Tweet, Lisa Stecker | 2003-09-30 |
| 6627919 | Thermally stable nickel germanosilicide formed on SiGe | Jer-Shen Maa, Douglas J. Tweet | 2003-09-30 |
| 6624043 | Metal gate CMOS and method of manufacturing the same | — | 2003-09-23 |
| 6616857 | C-axis oriented lead germanate film | Tingkai Li, Fengyan Zhang, Yoshi Ono | 2003-09-09 |
| 6613626 | Method of forming CMOS transistor having a deep sub-micron mid-gap metal gate | — | 2003-09-02 |
| 6602720 | Single transistor ferroelectric transistor structure with high-K insulator and method of fabricating same | Fengyan Zhang | 2003-08-05 |
| 6596344 | Method of depositing a high-adhesive copper thin film on a metal nitride substrate | Wei-Wei Zhuang, Lawrence J. Charneski, David R. Evans | 2003-07-22 |
| 6590243 | Ferroelastic lead germanate thin film and deposition method | Tingkai Li, Fengyan Zhang, Yoshi Ono | 2003-07-08 |
| 6585821 | Method of monitoring PGO spin-coating precursor solution synthesis using UV spectroscopy | Wei-Wei Zhuang, Fengyan Zhang, Jer-Shen Maa | 2003-07-01 |
| 6586260 | Single c-axis PGO thin film electrodes having good surface smoothness and uniformity and methods for making the same | Fengyan Zhang, Jer-Shen Maa, Wei-Wei Zhuang | 2003-07-01 |
| 6583000 | Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation | Jong-Jan Lee, Jer-Shen Maa, Douglas J. Tweet | 2003-06-24 |
| 6583003 | Method of fabricating 1T1R resistive memory array | Wei-Wei Zhuang | 2003-06-24 |
| 6579793 | Method of achieving high adhesion of CVD copper thin films on TaN Substrates | Wei-Wei Zhuang, Wei Pan, David R. Evans | 2003-06-17 |
| 6576292 | Method of forming highly adhesive copper thin films on metal nitride substrates via CVD | Wei-Wei Zhuang, David R. Evans | 2003-06-10 |