Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630702 | Method of using titanium doped aluminum oxide for passivation of ferroelectric materials and devices including the same | Fengyan Zhang, Sheng Teng Hsu | 2003-10-07 |
| 6555874 | Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrate | Sheng Teng Hsu, Douglas J. Tweet, Bruce D. Ulrich | 2003-04-29 |
| 6541385 | Method for plasma etching of Ir-Ta-O electrode and for post-etch cleaning | Fengyan Zhang, Jer-Shen Maa, Sheng Teng Hsu | 2003-04-01 |
| 6503763 | Method of making MFMOS capacitors with high dielectric constant materials | Tingkai Li, Sheng Teng Hsu, Bruce D. Ulrich, Yanjun Ma | 2003-01-07 |