Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627919 | Thermally stable nickel germanosilicide formed on SiGe | Jer-Shen Maa, Sheng Teng Hsu | 2003-09-30 |
| 6627510 | Method of making self-aligned shallow trench isolation | David R. Evans, Sheng Teng Hsu, Bruce D. Ulrich, Lisa Stecker | 2003-09-30 |
| 6620664 | Silicon-germanium MOSFET with deposited gate dielectric and metal gate electrode and method for making the same | Yanjun Ma, David R. Evans | 2003-09-16 |
| 6583000 | Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation | Sheng Teng Hsu, Jong-Jan Lee, Jer-Shen Maa | 2003-06-24 |
| 6562703 | Molecular hydrogen implantation method for forming a relaxed silicon germanium layer with high germanium content | Jer-Shen Maa, Sheng Teng Hsu, Jong-Jan Lee | 2003-05-13 |
| 6555874 | Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrate | Sheng Teng Hsu, Bruce D. Ulrich, Hong Ying | 2003-04-29 |
| 6534871 | Device including an epitaxial nickel silicide on (100) Si or stable nickel silicide on amorphous Si and a method of fabricating the same | Jer-Shen Maa, Yoshi Ono, Fengyan Zhang, Sheng Teng Hsu | 2003-03-18 |
| 6506637 | Method to form thermally stable nickel germanosilicide on SiGe | Jer-Shen Maa, Sheng Teng Hsu | 2003-01-14 |