Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2003-12-30 |
| 6660628 | Method of MOCVD Ti-based barrier metal thin films with tetrakis (methylethylamino) titanium with octane | Wei Pan, Wei-Wei Zhuang, Sheng Teng Hsu | 2003-12-09 |
| 6632731 | Structure and method of making a sub-micron MOS transistor | Yanjun Ma, Yoshi Ono, Sheng Teng Hsu | 2003-10-14 |
| 6627510 | Method of making self-aligned shallow trench isolation | Sheng Teng Hsu, Bruce D. Ulrich, Douglas J. Tweet, Lisa Stecker | 2003-09-30 |
| 6620664 | Silicon-germanium MOSFET with deposited gate dielectric and metal gate electrode and method for making the same | Yanjun Ma, Douglas J. Tweet | 2003-09-16 |
| 6596344 | Method of depositing a high-adhesive copper thin film on a metal nitride substrate | Wei-Wei Zhuang, Lawrence J. Charneski, Sheng Teng Hsu | 2003-07-22 |
| 6586344 | Precursors for zirconium and hafnium oxide thin film deposition | Wei-Wei Zhuang | 2003-07-01 |
| 6579793 | Method of achieving high adhesion of CVD copper thin films on TaN Substrates | Wei-Wei Zhuang, Wei Pan, Sheng Teng Hsu | 2003-06-17 |
| 6576292 | Method of forming highly adhesive copper thin films on metal nitride substrates via CVD | Wei-Wei Zhuang, Sheng Teng Hsu | 2003-06-10 |
| 6576293 | Method to improve copper thin film adhesion to metal nitride substrates by the addition of water | Wei-Wei Zhuang, Sheng Teng Hsu | 2003-06-10 |
| 6573134 | Dual metal gate CMOS devices and method for making the same | Yanjun Ma, Yoshi Ono, Sheng Teng Hsu | 2003-06-03 |
| 6555916 | Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides | Tue Nguyen, Lawrence J. Charneski, Sheng Teng Hsu | 2003-04-29 |
| 6509268 | Thermal densification in the early stages of copper MOCVD for depositing high quality Cu films with good adhesion and trench filling characteristics | Wei Pan, Sheng Teng Hsu | 2003-01-21 |
| 6509260 | Method of shallow trench isolation using a single mask | Sheng Teng Hsu | 2003-01-21 |
| 6506643 | Method for forming a damascene FeRAM cell structure | Sheng Teng Hsu | 2003-01-14 |