Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2003-12-30 |
| 6670266 | Multilayered diffusion barrier structure for improving adhesion property | Tai Dung Nguyen | 2003-12-30 |
| 6645860 | Adhesion promotion method for CVD copper metallization in IC applications | Lawrence J. Charneski, Gautam Bhandari | 2003-11-11 |
| 6641672 | Replaceable shielding apparatus | — | 2003-11-04 |
| 6630396 | Use of a silicon carbide adhesion promoter layer to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon | Hongning Yang | 2003-10-07 |
| 6610169 | Semiconductor processing system and method | Tai Dung Nguyen, Craig Bercaw | 2003-08-26 |
| 6609632 | Removable lid and floating pivot | Craig Bercaw | 2003-08-26 |
| 6572707 | Vaporizer for sensitive precursors | — | 2003-06-03 |
| 6572706 | Integrated precursor delivery system | Craig Bercaw | 2003-06-03 |
| 6565661 | High flow conductance and high thermal conductance showerhead system and method | — | 2003-05-20 |
| 6555916 | Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides | Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu | 2003-04-29 |