Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669870 | Substituted phenylethylene precursor synthesis method | Wei-Wei Zhuang, Tue Nguyen, David R. Evans, Sheng Teng Hsu | 2003-12-30 |
| 6645860 | Adhesion promotion method for CVD copper metallization in IC applications | Tue Nguyen, Gautam Bhandari | 2003-11-11 |
| 6596344 | Method of depositing a high-adhesive copper thin film on a metal nitride substrate | Wei-Wei Zhuang, David R. Evans, Sheng Teng Hsu | 2003-07-22 |
| 6555916 | Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides | Tue Nguyen, David R. Evans, Sheng Teng Hsu | 2003-04-29 |