Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627919 | Thermally stable nickel germanosilicide formed on SiGe | Douglas J. Tweet, Sheng Teng Hsu | 2003-09-30 |
| 6586260 | Single c-axis PGO thin film electrodes having good surface smoothness and uniformity and methods for making the same | Fengyan Zhang, Wei-Wei Zhuang, Sheng Teng Hsu | 2003-07-01 |
| 6585821 | Method of monitoring PGO spin-coating precursor solution synthesis using UV spectroscopy | Wei-Wei Zhuang, Fengyan Zhang, Sheng Teng Hsu | 2003-07-01 |
| 6583000 | Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation | Sheng Teng Hsu, Jong-Jan Lee, Douglas J. Tweet | 2003-06-24 |
| 6562703 | Molecular hydrogen implantation method for forming a relaxed silicon germanium layer with high germanium content | Douglas J. Tweet, Sheng Teng Hsu, Jong-Jan Lee | 2003-05-13 |
| 6555456 | Method of forming iridium conductive electrode/barrier structure | Fengyan Zhang, Sheng Teng Hsu | 2003-04-29 |
| 6541385 | Method for plasma etching of Ir-Ta-O electrode and for post-etch cleaning | Hong Ying, Fengyan Zhang, Sheng Teng Hsu | 2003-04-01 |
| 6537361 | Method of the synthesis and control of PGO spin-coating precursor solutions | Wei-Wei Zhuang, Fengyan Zhang, Sheng Teng Hsu | 2003-03-25 |
| 6534871 | Device including an epitaxial nickel silicide on (100) Si or stable nickel silicide on amorphous Si and a method of fabricating the same | Douglas J. Tweet, Yoshi Ono, Fengyan Zhang, Sheng Teng Hsu | 2003-03-18 |
| 6506637 | Method to form thermally stable nickel germanosilicide on SiGe | Douglas J. Tweet, Sheng Teng Hsu | 2003-01-14 |