Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616985 | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor | Gabriel I. Font-Rodriguez, Simon Selitser, Emerson Derryck Settles | 2003-09-09 |
| 6607982 | High magnesium content copper magnesium alloys as diffusion barriers | Sridhar Karthik Kailasam, E. Derryck Settles, Larry R. Lane | 2003-08-19 |
| 6589887 | Forming metal-derived layers by simultaneous deposition and evaporation of metal | Jeremie J. Dalton, Sridhar Karthik Kailasam, Sasangan Ramanathan | 2003-07-08 |
| 6554914 | Passivation of copper in dual damascene metalization | Robert T. Rozbicki, Erich R. Klawuhn, Michal Danek, Karl B. Levy, Jonathan D. Reid +2 more | 2003-04-29 |
| 6553933 | Apparatus for injecting and modifying gas concentration of a meta-stable species in a downstream plasma reactor | Gabriel I. Font-Rodriguez, Simon Selitser, Emerson Derryck Settles | 2003-04-29 |
| 6541374 | Method of depositing a diffusion barrier for copper interconnection applications | Tarek Suwwan de Felipe, Michal Danek, Erich R. Klawuhn | 2003-04-01 |
| 6525829 | Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity | E. Derryck Settles, Sridhar Karthik Kailasam | 2003-02-25 |