Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616985 | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor | Ronald A. Powell, Simon Selitser, Emerson Derryck Settles | 2003-09-09 |
| 6553933 | Apparatus for injecting and modifying gas concentration of a meta-stable species in a downstream plasma reactor | Ronald A. Powell, Simon Selitser, Emerson Derryck Settles | 2003-04-29 |