Issued Patents 2003
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669825 | Method of forming a dielectric film | Shigetoshi Sugawa | 2003-12-30 |
| 6650678 | Laser oscillating apparatus | Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2003-11-18 |
| 6646352 | Gate electrode comprising body centered cubic tantalum and tantalum nitride | Hiroyuki Shimada | 2003-11-11 |
| 6638392 | Plasma process apparatus | Naoko Yamamoto, Takamitsu Tadera, Tatsushi Yamamoto, Masaki Hirayama | 2003-10-28 |
| 6629540 | Wet treatment apparatus | Kenichi Mitsumori | 2003-10-07 |
| 6622543 | Gas detection sensor | Kouji Kawada, Nobukazu Ikeda, Akihiro Morimoto, Yukio Minami, Katunori Komehana +1 more | 2003-09-23 |
| 6620290 | Plasma process apparatus | Tatsushi Yamamoto, Masaya Okamoto, Masaki Hirayama | 2003-09-16 |
| 6618922 | Cooperating fixing jigs for aligning a plurality of lower members on a support member | Michio Yamaji, Tsutomu Shinohara | 2003-09-16 |
| 6615871 | Fluid control apparatus | Hiroshi Morokoshi, Michio Yamaji, Shigeaki Tanaka, Keiji Hirao, Yuji Kawano +5 more | 2003-09-09 |
| 6612898 | Method for forming oxidation-passive layer, fluid-contacting part, and fluid feed/discharge system | Takahisa Nitta | 2003-09-02 |
| 6609564 | Reductive heat exchange water and heat exchange system using such water | Takashi Imaoka, Hiroshi Morita, Isamu Sugiyama, Masaki Hirayama | 2003-08-26 |
| 6606912 | Structure or construction for mounting a pressure detector | Takashi Hirose, Eiji Ideta, Nobukazu Ikeda, Ryousuke Dohi, Kouji Nishino +6 more | 2003-08-19 |
| 6605134 | Method and apparatus for collecting rare gas | Yoshio Ishihara, Shigeru Hayashida, Toru Nagasaka, Tetsuya Kimijima | 2003-08-12 |
| 6606119 | Semiconductor arithmetic circuit | Tadashi Shibata | 2003-08-12 |
| 6603786 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Nobuyoshi Tanaka, Masaki Hirayama | 2003-08-05 |
| 6593634 | Semiconductor device and method of manufacturing the same | Hiroyuki Shimada | 2003-07-15 |
| 6585910 | Etchant | Hirohisa Kikuyama, Masayuki Miyashita, Tatsuhiro Yabune | 2003-07-01 |
| 6585851 | Plasma etching device | Masaki Hirayama, Haruyuki Takano, Yusuke Hirayama | 2003-07-01 |
| 6563072 | Welding technique for forming passive chromium oxide film in weld and gas feed system for welding | Takahisa Nitta, Yasuyuki Shirai, Osamu Nakamura | 2003-05-13 |
| 6559674 | Variable function information processor | Satoshi Sakaidani, Naoto Miyamoto, Akira Nakada, Shigetoshi Sugawa | 2003-05-06 |
| 6551948 | Flash memory device and a fabrication process thereof, method of forming a dielectric film | Shigetoshi Sugawa | 2003-04-22 |
| 6547660 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Osamu Suenaga, Sadao Kobayashi | 2003-04-15 |
| 6538388 | Plasma processing apparatus suitable for power supply of higher frequency | Akira Nakano | 2003-03-25 |
| 6527908 | Plasma process apparatus | Norio Kanetsuki, Takamitsu Tadera, Tatsushi Yamamoto, Masaki Hirayama | 2003-03-04 |
| 6517635 | Liquid feed nozzle, wet treatment apparatus and wet treatment method | Kenichi Mitsumori, Yasuhiko Kasama, Akira Abe, Oh Eui Yeol, Takayuki Imaoka +1 more | 2003-02-11 |