Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638392 | Plasma process apparatus | Naoko Yamamoto, Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2003-10-28 |
| 6527908 | Plasma process apparatus | Norio Kanetsuki, Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2003-03-04 |