Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638392 | Plasma process apparatus | Naoko Yamamoto, Takamitsu Tadera, Masaki Hirayama, Tadahiro Ohmi | 2003-10-28 |
| 6620290 | Plasma process apparatus | Masaya Okamoto, Masaki Hirayama, Tadahiro Ohmi | 2003-09-16 |
| 6586055 | Method for depositing functionally gradient thin film | Yasuji Nakahama, Yuzo Mori | 2003-07-01 |
| 6527908 | Plasma process apparatus | Norio Kanetsuki, Takamitsu Tadera, Masaki Hirayama, Tadahiro Ohmi | 2003-03-04 |