Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650678 | Laser oscillating apparatus | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara | 2003-11-18 |
| 6638392 | Plasma process apparatus | Naoko Yamamoto, Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2003-10-28 |
| 6620290 | Plasma process apparatus | Tatsushi Yamamoto, Masaya Okamoto, Tadahiro Ohmi | 2003-09-16 |
| 6609564 | Reductive heat exchange water and heat exchange system using such water | Takashi Imaoka, Hiroshi Morita, Isamu Sugiyama, Tadahiro Ohmi | 2003-08-26 |
| 6603786 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Tadahiro Ohmi, Nobuyoshi Tanaka | 2003-08-05 |
| 6585851 | Plasma etching device | Tadahiro Ohmi, Haruyuki Takano, Yusuke Hirayama | 2003-07-01 |
| 6527908 | Plasma process apparatus | Norio Kanetsuki, Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2003-03-04 |