Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652709 | Plasma processing apparatus having circular waveguide, and plasma processing method | Shigenobu Yokoshima | 2003-11-25 |
| 6650678 | Laser oscillating apparatus | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2003-11-18 |
| 6541982 | Plasma density measuring method and apparatus, and plasma processing system using the same | Hideo Kitagawa | 2003-04-01 |