Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613835 | Wet sealing materials and building components useful for clean rooms and local facilities | Masayuki Imafuku, Yoshihide Wakayama | 2003-09-02 |
| 6569696 | Device and method for manufacturing semiconductor | Osamu Suenaga, Makoto Yamamoto, Naoki Mori, Hiromu Ito | 2003-05-27 |
| 6547660 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Osamu Suenaga, Tadahiro Ohmi | 2003-04-15 |