Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569696 | Device and method for manufacturing semiconductor | Makoto Yamamoto, Naoki Mori, Hiromu Ito, Sadao Kobayashi | 2003-05-27 |
| 6547660 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Tadahiro Ohmi, Sadao Kobayashi | 2003-04-15 |