Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646352 | Gate electrode comprising body centered cubic tantalum and tantalum nitride | Tadahiro Ohmi | 2003-11-11 |
| 6593634 | Semiconductor device and method of manufacturing the same | Tadahiro Ohmi | 2003-07-15 |
| 6579769 | Semiconductor device manufacturing method including forming FOX with dual oxidation | Masaaki Higashitani, Hideo Kurihara, Hideki Komori, Satoshi Takahashi | 2003-06-17 |