Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650957 | Method and apparatus for run-to-run control of deposition process | Thomas J. Sonderman, Craig W. Christian | 2003-11-18 |
| 6607926 | Method and apparatus for performing run-to-run control in a batch manufacturing environment | Anthony J. Toprac, Christopher A. Bode | 2003-08-19 |
| 6592429 | Method and apparatus for controlling wafer uniformity in a chemical mechanical polishing tool using carrier head signatures | — | 2003-07-15 |
| 6567718 | Method and apparatus for monitoring consumable performance | Jeremy Lansford, Michael R. Conboy | 2003-05-20 |
| 6560503 | Method and apparatus for monitoring controller performance using statistical process control | Anthony J. Toprac | 2003-05-06 |
| 6556884 | Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework | Michael L. Miller, Anatasia L. Oshelski | 2003-04-29 |
| 6546306 | Method for adjusting incoming film thickness uniformity such that variations across the film after polishing minimized | Scott Bushman | 2003-04-08 |
| 6529789 | Method and apparatus for automatic routing for reentrant processes | Anthony J. Toprac, Christopher A. Bone | 2003-03-04 |