Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6546306 | Method for adjusting incoming film thickness uniformity such that variations across the film after polishing minimized | William J. Campbell | 2003-04-08 |
| 6535783 | Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework | Michael L. Miller | 2003-03-18 |