Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643557 | Method and apparatus for using scatterometry to perform feedback and feed-forward control | Anthony J. Toprac | 2003-11-04 |
| 6640148 | Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework | Elfido Coss, Jr. | 2003-10-28 |
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Qingsu Wang, Michael R. Conboy, W. Jarrett Campbell | 2003-09-30 |
| 6622059 | Automated process monitoring and analysis system for semiconductor processing | Anthony J. Toprac | 2003-09-16 |
| 6615098 | Method and apparatus for controlling a tool using a baseline control script | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2003-09-02 |
| 6600985 | Roll sensor system for a vehicle | Ralph M. Weaver | 2003-07-29 |
| 6556959 | Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers | Qingsu Wang | 2003-04-29 |
| 6556884 | Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework | Anatasia L. Oshelski, William J. Campbell | 2003-04-29 |
| 6556881 | Method and apparatus for integrating near real-time fault detection in an APC framework | — | 2003-04-29 |
| 6535783 | Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework | Scott Bushman | 2003-03-18 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Qingsu Wang, Elfido Coss, Jr. | 2003-03-11 |
| 6511452 | Tampon applicator with improved fingergrip | Jamshid Rejai, Robert C. Norquest | 2003-01-28 |