Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666337 | Method and apparatus for determining wafer identity and orientation | Sam Allen, Elfido Coss, Jr. | 2003-12-23 |
| 6662076 | Management of move requests from a factory system to an automated material handling system | Russel Shirley, Jason Grover | 2003-12-09 |
| 6662070 | Wafer rotation randomization in cluster tool processing | Sam Allen, Russel Shirley, Elfido Coss, Jr. | 2003-12-09 |
| 6638778 | Method for determining, tracking and/or controlling processing based upon silicon characteristics | Anastasia Oshelski Peterson, Sam Allen, Jason Grover | 2003-10-28 |
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Qingsu Wang, Michael L. Miller, W. Jarrett Campbell | 2003-09-30 |
| 6625556 | Wafer rotation randomization for process defect detection in semiconductor fabrication | Sam Allen, Elfido Coss, Jr. | 2003-09-23 |
| 6622111 | Wafer rotation in semiconductor processing | Elfido Coss, Jr., Sam Allen | 2003-09-16 |
| 6571371 | Method and apparatus for using latency time as a run-to-run control parameter | Elfido Coss, Jr., Bryce A. Hendrix | 2003-05-27 |
| 6567718 | Method and apparatus for monitoring consumable performance | William J. Campbell, Jeremy Lansford | 2003-05-20 |
| 6556882 | Method and apparatus for generating real-time data from static files | Elfido Coss, Jr., Qingsu Wang | 2003-04-29 |