Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666337 | Method and apparatus for determining wafer identity and orientation | Michael R. Conboy, Sam Allen | 2003-12-23 |
| 6662070 | Wafer rotation randomization in cluster tool processing | Michael R. Conboy, Sam Allen, Russel Shirley | 2003-12-09 |
| 6640148 | Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework | Michael L. Miller | 2003-10-28 |
| 6625556 | Wafer rotation randomization for process defect detection in semiconductor fabrication | Michael R. Conboy, Sam Allen | 2003-09-23 |
| 6622111 | Wafer rotation in semiconductor processing | Michael R. Conboy, Sam Allen | 2003-09-16 |
| 6594589 | Method and apparatus for monitoring tool health | Richard J. Markle, Patrick M. Cowan | 2003-07-15 |
| 6571371 | Method and apparatus for using latency time as a run-to-run control parameter | Michael R. Conboy, Bryce A. Hendrix | 2003-05-27 |
| 6556882 | Method and apparatus for generating real-time data from static files | Michael R. Conboy, Qingsu Wang | 2003-04-29 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Thomas J. Sonderman, Qingsu Wang | 2003-04-08 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Michael L. Miller, Qingsu Wang | 2003-03-11 |