Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Michael R. Conboy, Michael L. Miller, W. Jarrett Campbell | 2003-09-30 |
| 6556882 | Method and apparatus for generating real-time data from static files | Michael R. Conboy, Elfido Coss, Jr. | 2003-04-29 |
| 6556959 | Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers | Michael L. Miller | 2003-04-29 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Thomas J. Sonderman, Elfido Coss, Jr. | 2003-04-08 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Michael L. Miller, Elfido Coss, Jr. | 2003-03-11 |