Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660539 | Methods for dynamically controlling etch endpoint time, and system for accomplishing same | Alexander J. Pasadyn | 2003-12-09 |
| 6650957 | Method and apparatus for run-to-run control of deposition process | William J. Campbell, Craig W. Christian | 2003-11-18 |
| 6650955 | Method and apparatus for determining a sampling plan based on process and equipment fingerprinting | Alexander J. Pasadyn, Christopher A. Bode | 2003-11-18 |
| 6645780 | Method and apparatus for combining integrated and offline metrology for process control | Alexander J. Pasadyn | 2003-11-11 |
| 6617258 | Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same | Matthew S. Ryskoski | 2003-09-09 |
| 6615098 | Method and apparatus for controlling a tool using a baseline control script | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2003-09-02 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Elfido Coss, Jr., Qingsu Wang | 2003-04-08 |
| 6524774 | Method of controlling photoresist thickness based upon photoresist viscosity | — | 2003-02-25 |
| 6511898 | Method for controlling deposition parameters based on polysilicon grain size feedback | Jeremy Lansford, Anthony J. Toprac | 2003-01-28 |