Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617258 | Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same | Thomas J. Sonderman | 2003-09-09 |
| 6593227 | Method and apparatus for planarizing surfaces of semiconductor device conductive layers | — | 2003-07-15 |
| 6582975 | Method of controlling the deposition of inter-level dielectric layers based upon electrical performance tests, and system for accomplishing same | — | 2003-06-24 |