Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613594 | Surface plasmon resonance-based endpoint detection for chemical mechanical planarization (CMP) | Christopher H. Lansford | 2003-09-02 |
| 6567718 | Method and apparatus for monitoring consumable performance | William J. Campbell, Michael R. Conboy | 2003-05-20 |
| 6511898 | Method for controlling deposition parameters based on polysilicon grain size feedback | Thomas J. Sonderman, Anthony J. Toprac | 2003-01-28 |