Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666337 | Method and apparatus for determining wafer identity and orientation | Michael R. Conboy, Elfido Coss, Jr. | 2003-12-23 |
| 6662070 | Wafer rotation randomization in cluster tool processing | Michael R. Conboy, Russel Shirley, Elfido Coss, Jr. | 2003-12-09 |
| 6638778 | Method for determining, tracking and/or controlling processing based upon silicon characteristics | Anastasia Oshelski Peterson, Jason Grover, Michael R. Conboy | 2003-10-28 |
| 6625556 | Wafer rotation randomization for process defect detection in semiconductor fabrication | Michael R. Conboy, Elfido Coss, Jr. | 2003-09-23 |
| 6622111 | Wafer rotation in semiconductor processing | Michael R. Conboy, Elfido Coss, Jr. | 2003-09-16 |