Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660651 | Adjustable wafer stage, and a method and system for performing process operations using same | — | 2003-12-09 |
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright | 2003-11-18 |
| 6639663 | Method and apparatus for detecting processing faults using scatterometry measurements | Matthew A. Purdy | 2003-10-28 |
| 6621412 | Troubleshooting method involving image-based fault detection and classification (FDC) and troubleshooting guide (TSG), and systems embodying the method | Elizabeth Weaver | 2003-09-16 |
| 6602723 | Method of integrating scatterometry metrology structures directly into die design | James Broc Stirton | 2003-08-05 |
| 6594589 | Method and apparatus for monitoring tool health | Elfido Coss, Jr., Patrick M. Cowan | 2003-07-15 |
| 6563300 | Method and apparatus for fault detection using multiple tool error signals | Timothy L. Jackson, Edward C. Stewart | 2003-05-13 |
| 6529282 | Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing same | James Broc Stirton | 2003-03-04 |