Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660543 | Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth | James Broc Stirton, Homi E. Nariman, Steven P. Reeves | 2003-12-09 |
| 6657716 | Method and apparatus for detecting necking over field/active transitions | Marilyn I. Wright | 2003-12-02 |
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Richard J. Markle, J. Broc Stirton, Marilyn I. Wright | 2003-11-18 |
| 6643008 | Method of detecting degradation in photolithography processes based upon scatterometric measurements of grating structures, and a device comprising such structures | James Broc Stirton | 2003-11-04 |
| 6630362 | Method and apparatus for performing trench depth analysis | — | 2003-10-07 |
| 6625514 | Method and apparatus for optical lifetime tracking of trench features | — | 2003-09-23 |
| 6597447 | Method and apparatus for periodic correction of metrology data | James Broc Stirton | 2003-07-22 |
| 6582863 | Method of controlling photolithography processes based upon scatterometric measurements of sub-nominal grating structures | James Broc Stirton | 2003-06-24 |
| 6562635 | Method of controlling metal etch processes, and system for accomplishing same | James Broc Stirton, Matthew A. Purdy | 2003-05-13 |
| 6537833 | Method and apparatus for characterizing an interconnect structure profile using scatterometry measurements | — | 2003-03-25 |