Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660543 | Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth | James Broc Stirton, Kevin R. Lensing, Homi E. Nariman | 2003-12-09 |