Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657716 | Method and apparatus for detecting necking over field/active transitions | Kevin R. Lensing | 2003-12-02 |
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, J. Broc Stirton | 2003-11-18 |
| 6509201 | Method and apparatus for monitoring wafer stress | — | 2003-01-21 |