Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, Marilyn I. Wright | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, Marilyn I. Wright | 2003-11-18 |