Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639663 | Method and apparatus for detecting processing faults using scatterometry measurements | Richard J. Markle | 2003-10-28 |
| 6562635 | Method of controlling metal etch processes, and system for accomplishing same | Kevin R. Lensing, James Broc Stirton | 2003-05-13 |
| 6555397 | Dry isotropic removal of inorganic anti-reflective coating after poly gate etching | Douglas J. Bonser, James H. Hussey, Jr. | 2003-04-29 |