Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653735 | CVD silicon carbide layer as a BARC and hard mask for gate patterning | Chih-Yuh Yang, Pei-Yuan Gao, Lu You | 2003-11-25 |
| 6555397 | Dry isotropic removal of inorganic anti-reflective coating after poly gate etching | Matthew A. Purdy, James H. Hussey, Jr. | 2003-04-29 |