Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501082 | Plasma deposition apparatus and method with controller | Toshio Goto, Masaru Hori, Masafumi Ito, Nobuo Ishii | 2002-12-31 |
| 6470824 | Semiconductor manufacturing apparatus | Shigemi Murakawa, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-10-29 |
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoshinobu Kawai, Yoko Ueda, Nobuo Ishii | 2002-09-17 |
| 6432208 | Plasma processing apparatus | Katsuhiko Iwabuchi, Ryo Kuwajima, Ryusuke Ushikoshi, Naohito Yamada, Tetsuya Kawajiri | 2002-08-13 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Nobuo Ishii, Yoshinobu Kawai, Yoko Ueda | 2002-08-13 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Shigemi Murakawa, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Tetsu Oosawa, Mitsuhiro Yuasa | 2002-03-19 |