Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-06-04 |