Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Toshiaki Hongoh | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Toshiaki Hongoh | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Tetsu Oosawa, Satoru Kawakami | 2002-03-19 |