Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Satoru Kawakami, Mitsuhiro Yuasa | 2002-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Satoru Kawakami, Mitsuhiro Yuasa | 2002-03-19 |