Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Mitsuhiro Yuasa | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Mitsuhiro Yuasa | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Tetsu Oosawa, Satoru Kawakami, Mitsuhiro Yuasa | 2002-03-19 |
| 6343565 | Flat antenna having rounded slot openings and plasma processing apparatus using the flat antenna | — | 2002-02-05 |