Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501082 | Plasma deposition apparatus and method with controller | Toshio Goto, Masaru Hori, Masafumi Ito, Satoru Kawakami | 2002-12-31 |
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoshinobu Kawai, Yoko Ueda, Satoru Kawakami | 2002-09-17 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Satoru Kawakami, Yoshinobu Kawai, Yoko Ueda | 2002-08-13 |
| 6433298 | Plasma processing apparatus | — | 2002-08-13 |
| 6404134 | Plasma processing system | — | 2002-06-11 |
| 6390018 | Microwave plasma treatment apparatus | — | 2002-05-21 |
| 6350347 | Plasma processing apparatus | Jiro Hata | 2002-02-26 |
| 6347602 | Plasma processing apparatus | Naohisa Goto, Makoto Ando | 2002-02-19 |