Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoko Ueda, Nobuo Ishii, Satoru Kawakami | 2002-09-17 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Nobuo Ishii, Satoru Kawakami, Yoko Ueda | 2002-08-13 |